Thin　films　of　Ce1Gd2Fe5-xGaxO12　(Ce,Ga:GIG)　were　prepared　on　Gd3Ga5O12　(GGG)　and　Ca2.90Li0.30Nb1.93Ga2.76O12　(CLNGG)　substrates　by　using　radio　frequency　magnetron　sputtering　technique.　The　phase,　grain　orientation,　surface　morphology,　transmittance,　magnetism　and　magnetic　circular　dichroism　(MCD)　properties　of　films　were　analyzed.　And　the　effects　of　lattice　mismatch　and　non-magnetic　Ga3+-doping　were　discussed.　The　results　show　that　the　films　with　higher　crystallized　quality　and　lower　stress　can　be　obtained　by　growing　on　CLNGG　than　on　GGG.　Moreover,　the　coercive　force,　magnetization,　magneto-optical　effect　intensity　and　orientation　of　film　can　be　effectively　regulated　by　adjusting　Ga3+-doped　concentration.　(C)　2016　Elsevier　B.V.　All　rights　reserved.