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We report in this paper the development of a spectral-domain optical coherence vibration tomography (OCVT) using a broadband CCD-based spectrometer and a short-coherence white light source. We demonstrate that both the vibration amplitude and frequency can be quantified, in the frequency range 0-250 Hz, with an axial resolution of 1 mu m. Furthermore, the inner structure (layer thickness) of a vibrating sample can also be quantified simultaneously. The developed OCVT is non-contact and noninvasive in nature, thus is ideal for real time and in situ monitoring of low-frequency micro-vibrations that have critical impacts on many high-precision manufacturing and engineering processes. (C) 2010 Elsevier Ltd. All rights reserved.
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OPTICS AND LASERS IN ENGINEERING
ISSN: 0143-8166
Year: 2011
Issue: 1
Volume: 49
Page: 127-131
1 . 8 3 8
JCR@2011
3 . 5 0 0
JCR@2023
ESI Discipline: ENGINEERING;
JCR Journal Grade:2
CAS Journal Grade:3
Cited Count:
WoS CC Cited Count: 20
SCOPUS Cited Count: 27
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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