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author:

Li, Weihao (Li, Weihao.) [1] | Zhu, Longguang (Zhu, Longguang.) [2] | Ji, Feng (Ji, Feng.) [3] | Yu, Jinling (Yu, Jinling.) [4] (Scholars:俞金玲) | Jin, Yufeng (Jin, Yufeng.) [5] | Wang, Wei (Wang, Wei.) [6]

Indexed by:

CPCI-S

Abstract:

In the past 60 years, integrated circuits have been developing in the direction of smaller size and higher integration under the guidance of Moore's law. However, the heat dissipation problem of the chip becomes prominent as the chip size decreases and the integration degree increases. Therefore, this paper presents a manifold microchannel interposer based on advanced packaging technology. Compared with traditional heat sink, the interposer has high heat dissipation performance, low flow resistance, strong compatibility with IC and small thickness. The micro-channel structure of the heat sink optimized by COMSOL (TM) simulation software and fabricated by etching, photolithography, silicon-silicon direct bonding, thin polishing and other microelectromechanical systems (MEMS). A stable and reliable thermal testing system is designed and tested for the thermal testing of heat sink. The test results show that when the input flow rate is 40 ml/min, the heat dissipation capacity can reaches 550 W/cm(2) , and the chip surface temperature is only 128 square.

Keyword:

Community:

  • [ 1 ] [Li, Weihao]Fuzhou Univ, Sch Phys & Informat Engn, Inst Micronano Devices & Solar Cells, Fuzhou, Peoples R China
  • [ 2 ] [Yu, Jinling]Fuzhou Univ, Sch Phys & Informat Engn, Inst Micronano Devices & Solar Cells, Fuzhou, Peoples R China
  • [ 3 ] [Li, Weihao]Peking Univ, Inst Microelect, Beijing, Peoples R China
  • [ 4 ] [Zhu, Longguang]Peking Univ, Inst Microelect, Beijing, Peoples R China
  • [ 5 ] [Jin, Yufeng]Peking Univ, Inst Microelect, Beijing, Peoples R China
  • [ 6 ] [Wang, Wei]Peking Univ, Inst Microelect, Beijing, Peoples R China
  • [ 7 ] [Ji, Feng]Beijing Inst Remote Sensing Equipment, Beijing, Peoples R China
  • [ 8 ] [Jin, Yufeng]Peking Univ, Natl Key Lab Micro Nano Fabricat Technol, Beijing, Peoples R China
  • [ 9 ] [Wang, Wei]Peking Univ, Natl Key Lab Micro Nano Fabricat Technol, Beijing, Peoples R China

Reprint 's Address:

  • [Wang, Wei]Peking Univ, Inst Microelect, Beijing, Peoples R China;;[Wang, Wei]Peking Univ, Natl Key Lab Micro Nano Fabricat Technol, Beijing, Peoples R China

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Source :

2019 IEEE 21ST ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC)

Year: 2019

Page: 66-70

Language: English

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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