Atomic　force　microscopy　(AFM)　is　a　powerful　and　ultra-precision　instrument　in　nano-scale,　which　is　widely　used　in　many　fields.　It　is　a　complex　and　time-consuming　process　for　AFM　imaging.　Most　of　the　original　AFM　images　are　with　low　resolution.　For　nano-scale　measurement　and　imaging,　it　is　very　important　to　obtain　super-resolution　images.　In　most　cases,　super-resolution　imaging　takes　a　long　time　and　the　quality　of　imaging　is　unsatisfactory.　In　this　regard,　a　novel　super-resolution　imaging　method　based　on　compressed　sensing　(CS)　technology　is　proposed　in　AFM.　In　the　experiment,　six　samples　with　different　morphology　were　used　to　test　the　effect　of　super-resolution　image　reconstruction　with　different　upscaling　factors　(2,　3　and　4).　The　quality　of　reconstructed　image　is　analyzed　and　evaluated　by　image　evaluation　metrics　(PSNR　and　SSIM).　The　relationship　between　the　reconstruction　quality　of　different　images　and　the　actual　TV　or　TV/R　of　sample　images　is　analyzed,　which　can　provide　a　preliminary　basis　for　predicting　the　imaging　quality.　Comparing　with　other　super-resolution　imaging　methods,　the　proposed　method　has　achieved　better　imaging　effect　both　visually　and　quantitatively.　In　summary,　super-resolution　imaging　method　based　on　CS　not　only　has　high　imaging　quality　but　also　has　high　speed.　©　2019　Elsevier　B.V.