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author:

Dong, Yibo (Dong, Yibo.) [1] | Cheng, Chuantong (Cheng, Chuantong.) [2] | Xu, Chen (Xu, Chen.) [3] | Mao, Xurui (Mao, Xurui.) [4] | Xie, Yiyang (Xie, Yiyang.) [5] | Chen, Hongda (Chen, Hongda.) [6] | Huang, Beiju (Huang, Beiju.) [7] | Zhao, Yongdong (Zhao, Yongdong.) [8] | Deng, Jun (Deng, Jun.) [9] | Guo, Weiling (Guo, Weiling.) [10] | Pan, Guanzhong (Pan, Guanzhong.) [11] | Sun, Jie (Sun, Jie.) [12]

Indexed by:

EI

Abstract:

A metal-catalyst-free method for the direct growth of patterned graphene on an insulating substrate is reported in this paper. Parylene N is used as the carbon source. The surface molecule layer of parylene N is cross-linked by argon plasma bombardment. Under high-temperature annealing, the cross-linking layer of parylene N is graphitized into nanocrystalline graphene, which is a process that transforms organic to inorganic and insulation to conduction, while the parylene N molecules below the cross-linking layer decompose and vaporize at high temperature. Using this technique, the direct growth of a graphene film in a large area and with good uniformity is achieved. The thickness of the graphene is determined by the thickness of the cross-linking layer. Patterned graphene films can be obtained directly by controlling the patterns of the cross-linking region (lithography-free patterning). Graphene-silicon Schottky junction photodetectors are fabricated using the as-grown graphene. The Schottky junction shows good performance. The application of direct-grown graphene in optoelectronics is achieved with a great improvement of the device fabrication efficiency compared with transferred graphene. When illuminated with a 792 nm laser, the responsivity and specific detectivity of the detector measured at room temperature are 275.9 mA/W and 4.93 × 109 cm Hz1/2/W, respectively. © Copyright © 2019 American Chemical Society.

Keyword:

Catalysts Graphene Graphene devices Lithography Molecules Nanocrystals Photodetectors Photons Silica Silicon oxides Substrates

Community:

  • [ 1 ] [Dong, Yibo]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Cheng, Chuantong]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 3 ] [Xu, Chen]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Mao, Xurui]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 5 ] [Xie, Yiyang]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 6 ] [Chen, Hongda]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 7 ] [Huang, Beiju]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 8 ] [Zhao, Yongdong]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 9 ] [Deng, Jun]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 10 ] [Guo, Weiling]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 11 ] [Pan, Guanzhong]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
  • [ 12 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350116, China

Reprint 's Address:

  • [xu, chen]key laboratory of optoelectronics technology, college of microelectronics, beijing university of technology, beijing; 100124, china

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Source :

ACS Applied Materials and Interfaces

ISSN: 1944-8244

Year: 2019

Issue: 15

Volume: 11

Page: 14427-14436

8 . 7 5 8

JCR@2019

8 . 5 0 0

JCR@2023

ESI HC Threshold:236

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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