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Abstract:
An frequency-domain optical coherence vibration tomography (AE-OCVT) system based on acoustic excitation and optical coherence tomography is proposed. Its applications in the non-contact structural vibration detection and modal analysis of microbeams are also studied. The AE-OCVT system utilizes the acoustic signal with different frequency and amplitude to excite the microbeams. Then, the vibration of the microbeam is measured. In this way, the non-contact and nondestructive vibration detection to the microbeam structure by the developed AE-OCVT system can be carried out. It is better than the conventional method based on the contact detection. To address the problem, the periodic signal in frequency domain is broadened due to the nonlinearity of time domain spectral interference signals and the energy leakage from the time domain signal with window truncation during Fourier transform of the spectral signal. The spectral wavelength calibration algorithm and the spectrum correction algorithm are utilized. After the error correction, the AE-OCVT system has ultra-precision displacement detection accuracy. The axial resolution can reach the sub-nanometer level. This work will be helpful for vibration detection and modal analysis of microstructures, which is of great significance to the design of micro-electromechanical systems (MEMS). © 2018, Science Press. All right reserved.
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Chinese Journal of Scientific Instrument
ISSN: 0254-3087
CN: 11-2179/TH
Year: 2018
Issue: 12
Volume: 39
Page: 47-54
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 3
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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