Ce3+-doped　Gd3Fe5O12　(Ce:GIG)　film　has　a　good　application　prospect　in　the　field　of　integrated　optical　device.　In　this　article,　Ce:GIG　and　Ce,Ga:GIG　films　were　deposited　onto　the　quartz　glass　substrate　by　using　radio-frequency　magnetron　sputtering　technology.　The　crystal　phase,　surface　morphology,　magnetization,　and　magnetic　circular　dichroism　properties　of　films　were　characterized　by　using　the　X-ray　powder　diffraction,　atomic　force　microscopy,　vibrating　sample　magnetometer,　and　circular　dichroism　spectrometer.　The　results　show　that　as-prepared　Ce,Ga:GIG　films　has　a　good　quality　and　show　an　excellent　magneto-optical　performance,　and　the　doping　of　Ga3+　ion　and　the　annealing　process　have　significant　effect　on　the　magnetism　and　magneto-optical　performances.　It　is　expected　that　Ce,Ga:GIG　film　with　a　moderate　Ga3+-doping　content　is　a　better　candidate　than　Ce:GIG　and　Ce:YIG　films　for　the　next　generation　of　integrated　optical　isolator　and　other　magneto-optical　equipment.　©　2015　The　American　Ceramic　Society.