Based　on　the　piezoelectric　principle,　in　consideration　of　adhesion,　interaction　between　asperities,　elastic-plastic　deformation　of　the　substrate,　microcantilever　elastic　recovery　and　so　on,　the　dynamic　characteristics　between　microcantilever　and　the　substrate　rough　surface　driven　by　piezoelectric　were　simulated　by　using　ABAQUS　finite　element　software.　The　results　showed　that　there　were　several　significant　contact-separation　cases　during　the　contact　process　of　each　piezoelectric　driving.　When　no　voltage　was　applied　for　2~4　μs,　bonding　between　beam　and　the　substrate　still　appeared.　A　small　portion　of　the　elastic-plastic　deformation　on　the　rough　surface　occurred　during　separation,　and　the　maximum　residual　stress　appeared　at　the　edge　of　the　contact　area.　With　the　increase　of　piezoelectric　driving　times,　the　effect　of　surface　bonding　enhanced　and　the　plastic　deformation　region　on　the　substrate　rough　surface　extended　to　two　sides　continuously,　which　influenced　the　reliability　of　the　contact　system.　©,　2015,　Chinese　Society　of　Agricultural　Machinery.　All　right　reserved.