In　this　study,　SmFe2　monolayer　and　SmFe2/Fe　multilayers　were　fabricated　by　the　IBSD　method.　It　scored　a　first　by　analyzing　the　TEM　images　of　SmFe2　monolayer　and　cross-sectional　configuration　of　SmFe2/Fe　multilayers.　The　soft　magnetic　properties　of　the　samples　were　measured　by　an　alternating　gradient　magnetometer　(AGM).　The　results　showed　that　both　SmFe2　monolayer　and　the　SmFe2　layers　in　the　multilayers　were　amorphous,　while　Fe　layers　were　polycrystalline.　Compact　and　high　cohesion　scale　can　be　observed　in　all　layers　for　the　multilayers.　In　addition,　an　obvious　transitional　area　between　the　film　and　substrate　existed　in　the　multilayers.　Due　to　the　strong　exchange-coupled　interaction　among　the　layers　of　SmFe2/Fe,　the　easy　axis　turned　to　the　direction　parallel　to　the　applied　magnetic　field,　and　the　much　smaller　coercive　force　of　the　x　direction　compared　with　that　of　the　SmFe2　monolayer　(10.80　vs.　23.96　kA/m)　contributed　to　the　excellent　soft　magnetic　properties　of　SmFe　2/Fe　multilayers.　©　2012　Elsevier　B.V.