To　build　the　reduced　order　model　(ROM)　of　an　electrostatically　actuated　micro-plate　device,　a　system　identification　modeling　based　on　the　energy　identification　approach　is　proposed.　The　kinetic　energy,　strain　energy　and　capacitance　of　the　nonlinear　system　are　written　as　the　multivariate　polynomial　functions　of　the　structural　modals.　The　unknown　coefficients　of　these　polynomials　are　fitted　using　the　least　squares　from　a　set　of　steady　state,　high-fidelity,　nonlinear　finite　element　models.　The　resulting　strain　energy　and　capacitance　expressions　can　be　used　to　develop　the　ROM.　The　simulation　with　the　ROM　is　with　a　much　lower　computational　cost,　and　the　calculating　results　agree　very　well　with　those　from　high-fidelity　finite　element　model　under　various　electric　loads,　and　thus,　the　modeling　approach　in　this　paper　has　been　validated.