In　the　modeling　and　simulation　of　the　micro-electronic　mechanical　systems　(MEMS)　devices,　the　large　deformation　or　the　geometrical　nonlinearity　must　be　considered.　Due　to　the　issue　of　mesh　distortion,　the　finite　element　method　is　ineffective　for　this　large　deformation　analysis.　However　the　meshless　method　shows　its　potential　in　this　area　because　no　mesh　is　need.　In　all　the　existent　methods,　the　local　Petrov-Galerkin　(MLPG)　method　is　an　ideal　mesh　free　methods.　In　this　paper,　a　local　meshless　formulation　is　developed　for　large　deformation　analysis.　The　local　radial　point　interpolation　(RPIM)　approximation　is　employed　to　construct　the　shape　functions　based　on　the　arbitrarily　distributed　field　nodes　and　the　Heaviside　weight　function.　The　discrete　system　equation　is　obtained　using　the　weighted　local　weak　form　and　based　on　the　total　Lagrangian　(TL)　approach,　which　refers　all　variables　to　the　initial　configuration.　The　Newton-Raphson　iteration　technique　is　used　to　get　the　final　results.　Examples　show　the　local　Petrov-Galerkin　method　is　effective　for　large　deformation　analysis.