Structure　evolution　of　Ag/Ni　super-lattice　films　with　different　layer　thickness　during　heating　have　been　observed　by　TEM.　All　deposited　super-lattice　films　show　the　lattice　strains　caused　by　Ag/Ni　interfacial　misfit　in　different　extend.　When　heating,　the　strains　tend　to　be　relaxed.　For　the　sample　with　5　atomic　planes　in　each　layer,　when　temperature　reached　250　°C,　the　new　grains　were　formed　and　grown　among　the　matrix.　Strain　relaxation　and　grain　growth　were　proceeded　simultaneously　until　about　350　°C.　At　temperature　near　400　°C,　a　drastic　grain　coarsening　was　occurred　and　it　completely　destroyed　the　layered　periodical　structure　of　the　film　at　about　450　°C.　With　increasing　layer　thickness,　the　temperatures　for　the　formation　of　new　grains,　grain　growth　and　coarsening　get　relatively　higher　and　the　state　of　grains　preferential　orientation　became　more　stable.　It　indicates　that　the　thermal　stability　of　the　structure　of　the　film　be　enhanced.　It　is　the　grain　coarsening,　which　finally　destroy　the　layered　periodical　structure　of　the　film.