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author:

Zhang, Xiugan (Zhang, Xiugan.) [1]

Indexed by:

EI Scopus

Abstract:

Thin film mixing integrated circuit has the advantages of good function, miniaturization, light weight and low cost. This paper introduced the molybdenum mask for the thin film mixing integrated circuit of micro-heart-sound-stethoscope by photoetching. The preparation of etching resistant agent and the photoetching process were described emphatically. The resistor, capacitor and electrode conducting wire were made according to the circuit parameters.

Keyword:

Electronic medical equipment Integrated circuits Masks

Community:

  • [ 1 ] [Zhang, Xiugan]Fuzhou Univ, Fuzhou, China

Reprint 's Address:

  • 章秀淦

    [zhang, xiugan]fuzhou univ, fuzhou, china

Email:

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Related Article:

Source :

Microfabrication Technology

ISSN: 1003-8213

CN: 43-1140/TN

Year: 1995

Issue: 3

Page: 59-62

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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