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Abstract:
Thin film mixing integrated circuit has the advantages of good function, miniaturization, light weight and low cost. This paper introduced the molybdenum mask for the thin film mixing integrated circuit of micro-heart-sound-stethoscope by photoetching. The preparation of etching resistant agent and the photoetching process were described emphatically. The resistor, capacitor and electrode conducting wire were made according to the circuit parameters.
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Microfabrication Technology
ISSN: 1003-8213
CN: 43-1140/TN
Year: 1995
Issue: 3
Page: 59-62
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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