Rare　earth　giant　magnetostrictive　thin　films　(RGMFs)　belong　to　a　new　type　of　electro　(magnetic)　-　mechanical　conversion　functional　materials.　Such　materials　have　broad　application　prospects　in　magnetic　surface　acoustic　wave　(MSAW)　devices.　In　this　paper,　RGMFs　samples　are　fabricated　by　ion　beam　sputtering　deposition　(IBSD).　In　order　to　improve　the　magnetic　sensitivity,　films　after　forming　are　heat-treated　at　different　temperatures　in　vacuum　condition.　RGMFs　magnetic　hysteresis　loops　and　static　magnetostriction　characteristics　are　measured　by　DWS　type　ultra　precision　displacement　meter　and　Alternating　Gradient　Magnetometer　respectively.　For　the　purpose　of　developing　better　functional　thin　films　aimed　at　MSAW　devices,　preparation　technology　and　effect　on　static-dynamic　magnetostriction　characteristics　of　RGMFs　samples　by　vacuum　annealing　treatment　are　primary　studied.　The　results　indicate　that　static-dynamic　magnetostrictive　characteristics　of　RGMFs　are　closely　related　to　factors　such　as　preparation　technology,　sputtering　position,　and　vacuum　sensitivity　enhancing　technology,　etc.　©　2010　IEEE.