This　paper　describes　the　assembly　of　2　nm　gold　nanoparticles　between　micro-fabricated　planar　electrodes　by　using　dielectrophoresis　(DEP).　The　optimal　conditions　for　effectively　dieletrophoretic　manipulation　have　been　established　through　theoretical　analysis　and　experimental　validation.　In　the　theoretical　analysis,　the　effect　of　Brownian　motion　was　taken　into　consideration,　as　well　as　the　electrothermal　flow　and　the　AC　electroosmosis　flow.　For　effective　manipulation　of　nanoparticles　using　DEP,　proper　high　electric　field　strength　is　desired　to　give　rise　to　dominate　DEP　effect,　since　the　higher　electric　field　strength　increases　the　Joule　heating　and　the　lower　strength　reduces　the　DEP　force.　The　current　results　indicate　that　the　input　voltage　of　16Vp-p,　150　kHz　leads　to　effective　assembly　of　2　nm　gold　nanoparticles.　Our　study　proved　that　the　DEP　is　capable　of　consistently　assembling　gold　nanoparticles　down　to　2　nm　in　diameter　with　micro-fabricated　electrodes,　which　was　thought　to　be　extremely　difficult　in　the　past.　©2010　IEEE.