• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
成果搜索

author:

Abliz, A. (Abliz, A..) [1] | Wan, D. (Wan, D..) [2] | Chen, J.-Y. (Chen, J.-Y..) [3] | Xu, L. (Xu, L..) [4] | He, J. (He, J..) [5] | Yang, Y. (Yang, Y..) [6] | Duan, H. (Duan, H..) [7] | Liu, C. (Liu, C..) [8] | Jiang, C. (Jiang, C..) [9] | Chen, H. (Chen, H..) [10] | Guo, T. (Guo, T..) [11] | Liao, L. (Liao, L..) [12]

Indexed by:

Scopus

Abstract:

This paper investigates the effects of different passivation layers (PVLs) on the electrical performance and reliability of amorphous indium gallium zinc oxide (a-In-Ga-ZnO) thin film transistors (TFTs). By rational design, the fabricated a-InGaZnO TFT with hafnium oxide and aluminumoxide (HfO2/Al2O3) dual PVLs exhibits a field-effect mobility of 13.5 cm2/Vs, low sub threshold swing of 0.32 V/decade, and especially, small threshold voltage shifts of 0.5 (-0.6) V and 1.1 (-1.2) V under positive (negative) gate bias, and light illumination stress at the relative humidity of 40%. Furthermore, the a-In-Ga-ZnO TFTswith HfO2/Al2O3 dual PVLs maintain reasonable mobility and electrical performance even exposure to ambient condition for up to four months. This enhanced stability is attributed to the presence of high-quality HfO2/Al2O3 dual PVLs, which not only could suppress the photodesorption, reduce the total trap density and subgap photoexcitation behavior, but also protect the channel from environmental effects. Thus, the rational-designed HfO2/Al2O3 dual PVLs passivated a-In-Ga-ZnO TFTs with superior reliability represent a great step toward the achievement of long-term reliable zinc oxide-based oxide TFTs. © 1963-2012 IEEE.

Keyword:

Amorphous indium-gallium-zinc oxide (a-In-Ga-ZnO); light illumination stress stability; passivation layers (PVLs); thin film transistors (TFTs)

Community:

  • [ 1 ] [Abliz, A.]Key Laboratory for Micro-/Nano-Optoelectronic Devices, Ministry of Education, School of Physics and Electronics, Hunan University, Changsha, 410082, China
  • [ 2 ] [Abliz, A.]School of Physics Science and Technology, Xinjiang University, Urumqi, 830046, China
  • [ 3 ] [Wan, D.]School of Physics and Technology, Wuhan University, Wuhan, 430072, China
  • [ 4 ] [Chen, J.-Y.]Institute of Optoelectronic Display, Fuzhou University, Fuzhou, 350002, China
  • [ 5 ] [Xu, L.]Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan
  • [ 6 ] [He, J.]School of Physics and Technology, Wuhan University, Wuhan, 430072, China
  • [ 7 ] [Yang, Y.]Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan
  • [ 8 ] [Yang, Y.]Institute of Optoelectronic Display, Fuzhou University, Fuzhou, 350002, China
  • [ 9 ] [Duan, H.]School of Physics Science and Technology, Xinjiang University, Urumqi, 830046, China
  • [ 10 ] [Liu, C.]School of Physics and Technology, Wuhan University, Wuhan, 430072, China
  • [ 11 ] [Jiang, C.]Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan
  • [ 12 ] [Chen, H.]Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan
  • [ 13 ] [Guo, T.]School of Physics Science and Technology, Xinjiang University, Urumqi, 830046, China
  • [ 14 ] [Liao, L.]Key Laboratory for Micro-/Nano-Optoelectronic Devices, Ministry of Education, School of Physics and Electronics, Hunan University, Changsha, 410082, China

Reprint 's Address:

  • [Yang, Y.]Department of Materials Science and Engineering, National Chiao Tung UniversityTaiwan

Show more details

Related Keywords:

Related Article:

Source :

IEEE Transactions on Electron Devices

ISSN: 0018-9383

Year: 2018

Issue: 7

Volume: 65

Page: 2844-2849

2 . 7 0 4

JCR@2018

2 . 9 0 0

JCR@2023

ESI HC Threshold:170

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 45

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

Affiliated Colleges:

Online/Total:342/10032731
Address:FZU Library(No.2 Xuyuan Road, Fuzhou, Fujian, PRC Post Code:350116) Contact Us:0591-22865326
Copyright:FZU Library Technical Support:Beijing Aegean Software Co., Ltd. 闽ICP备05005463号-1