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author:

Dong, Y. (Dong, Y..) [1] | Cheng, C. (Cheng, C..) [2] | Xu, C. (Xu, C..) [3] | Mao, X. (Mao, X..) [4] | Xie, Y. (Xie, Y..) [5] | Chen, H. (Chen, H..) [6] | Huang, B. (Huang, B..) [7] | Zhao, Y. (Zhao, Y..) [8] | Deng, J. (Deng, J..) [9] | Guo, W. (Guo, W..) [10] | Pan, G. (Pan, G..) [11] | Sun, J. (Sun, J..) [12]

Indexed by:

Scopus

Abstract:

A metal-catalyst-free method for the direct growth of patterned graphene on an insulating substrate is reported in this paper. Parylene N is used as the carbon source. The surface molecule layer of parylene N is cross-linked by argon plasma bombardment. Under high-temperature annealing, the cross-linking layer of parylene N is graphitized into nanocrystalline graphene, which is a process that transforms organic to inorganic and insulation to conduction, while the parylene N molecules below the cross-linking layer decompose and vaporize at high temperature. Using this technique, the direct growth of a graphene film in a large area and with good uniformity is achieved. The thickness of the graphene is determined by the thickness of the cross-linking layer. Patterned graphene films can be obtained directly by controlling the patterns of the cross-linking region (lithography-free patterning). Graphene-silicon Schottky junction photodetectors are fabricated using the as-grown graphene. The Schottky junction shows good performance. The application of direct-grown graphene in optoelectronics is achieved with a great improvement of the device fabrication efficiency compared with transferred graphene. When illuminated with a 792 nm laser, the responsivity and specific detectivity of the detector measured at room temperature are 275.9 mA/W and 4.93 × 10 9 cm Hz 1/2 /W, respectively. © Copyright © 2019 American Chemical Society.

Keyword:

cross-linking; direct growth; graphene; metal-catalyst-free; parylene; photodetector; Schottky junction

Community:

  • [ 1 ] [Dong, Y.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 2 ] [Cheng, C.]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 3 ] [Xu, C.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 4 ] [Mao, X.]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 5 ] [Xie, Y.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 6 ] [Chen, H.]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 7 ] [Huang, B.]State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 8 ] [Zhao, Y.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 9 ] [Deng, J.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 10 ] [Guo, W.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 11 ] [Pan, G.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 12 ] [Sun, J.]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, 350116, China

Reprint 's Address:

  • [Xu, C.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of TechnologyChina

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Source :

ACS Applied Materials and Interfaces

ISSN: 1944-8244

Year: 2019

Issue: 15

Volume: 11

Page: 14427-14436

8 . 7 5 8

JCR@2019

8 . 5 0 0

JCR@2023

ESI HC Threshold:236

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 8

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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