• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
成果搜索

author:

Li, W. (Li, W..) [1] | Zhu, L. (Zhu, L..) [2] | Ji, F. (Ji, F..) [3] | Yu, J. (Yu, J..) [4] | Jin, Y. (Jin, Y..) [5] | Wang, W. (Wang, W..) [6]

Indexed by:

Scopus

Abstract:

In the past 60 years, integrated circuits have been developing in the direction of smaller size and higher integration under the guidance of Moore's law. However, the heat dissipation problem of the chip becomes prominent as the chip size decreases and the integration degree increases. Therefore, this paper presents a manifold microchannel interposer based on advanced packaging technology. Compared with traditional heat sink, the interposer has high heat dissipation performance, low flow resistance, strong compatibility with IC and small thickness. The micro-channel structure of the heat sink optimized by COMSOL™ simulation software and fabricated by etching, photolithography, silicon-silicon direct bonding, thin polishing and other microelectromechanical systems (MEMS). A stable and reliable thermal testing system is designed and tested for the thermal testing of heat sink. The test results show that when the input flow rate is 40 ml/min, the heat dissipation capacity can reaches 550 W/cm2, and the chip surface temperature is only 128 □. © 2019 IEEE.

Keyword:

Community:

  • [ 1 ] [Li, W.]Institute of Micro-Nano Devices &solar Cells, School of Physics and Information Engineering, Fuzhou University, Fuzhou, China
  • [ 2 ] [Li, W.]Institute of Microelectronics, Peking University, Beijing, China
  • [ 3 ] [Zhu, L.]Institute of Microelectronics, Peking University, Beijing, China
  • [ 4 ] [Ji, F.]Beijing Institute of Remote Sensing Equipment, Beijing, China
  • [ 5 ] [Yu, J.]Institute of Micro-Nano Devices &solar Cells, School of Physics and Information Engineering, Fuzhou University, Fuzhou, China
  • [ 6 ] [Jin, Y.]Institute of Microelectronics, Peking University, Beijing, China
  • [ 7 ] [Jin, Y.]National Key Lab of Micro/Nano Fabrication Technology, Peking University, Beijing, China
  • [ 8 ] [Wang, W.]Institute of Microelectronics, Peking University, Beijing, China
  • [ 9 ] [Wang, W.]National Key Lab of Micro/Nano Fabrication Technology, Peking University, Beijing, China

Reprint 's Address:

  • [Wang, W.]Institute of Microelectronics, Peking UniversityChina

Show more details

Related Keywords:

Related Article:

Source :

2019 IEEE 21st Electronics Packaging Technology Conference, EPTC 2019

Year: 2019

Page: 66-70

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

Affiliated Colleges:

Online/Total:262/10020505
Address:FZU Library(No.2 Xuyuan Road, Fuzhou, Fujian, PRC Post Code:350116) Contact Us:0591-22865326
Copyright:FZU Library Technical Support:Beijing Aegean Software Co., Ltd. 闽ICP备05005463号-1