Herein,　YbFeO3　films　are　synthesized　by　using　radio　frequency　magnetron　sputtering　and　influence　of　substrate　on　film　quality　and　magneto-optical　properties　is　systematically　investigated　by　depositing　YbFeO3　films　on　different　substrates,　such　as　quartz　glass,　sapphire(0001),　MgO(111),　YSZ(111),　SrTiO3(STO)(100)　and　SiO2(0001).　The　crystal　structure,　surface　morphology,　magnetic　behavior　and　magnetic　circular　dichroism　are　characterized　by　using　x-ray　diffraction,　scanning　electron　microscopy,　vibrating　sample　magnetometer　and　magnetic　circular　dichroism　spectrometer.　The　crystallinity　of　films　has　been　enhanced　by　thermal　annealing　at　elevated　temperatures.　The　results　reveal　that　highly　crystalline　YbFeO3　films　can　be　obtained　after　annealing　at　800　°C.　Moreover,　the　influence　of　lattice　mismatch　between　substrate　and　film　on　film　quality,　growth　orientation　and　surface　morphology　has　been　discussed　in　detail.　The　results　reveal　that　large　degree　of　lattice　mismatch　led　to　the　formation　of　surface　cracks　and　hindered　the　preferred　growth　orientation　of　film.　Furthermore,　it　has　been　demonstrated　that　the　choice　of　substrate　significantly　affected　the　optical,　magnetic　and　magneto-optical　properties　of　the　YbFeO3　films,　which　exhibited　obvious　magnetic　anisotropy,　excellent　coercivity　of　∼882　Oe　and　significant　magneto-optical　anisotropy.　©　2020　IOP　Publishing　Ltd.