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author:

Hsieh, W.-K. (Hsieh, W.-K..) [1] | Lam, K.-T. (Lam, K.-T..) [2] | Chang, S.-J. (Chang, S.-J..) [3]

Indexed by:

Scopus

Abstract:

The authors report the fabrication and characterization of resistive random access memory (RRAM) with Ni/ZnO/HfO2/Ni structure at room temperature. It was found that the proposed device exhibited bipolar switching behavior with multilevel characteristics in a reset process. It was found that the device exhibited two-step reset stage under high reset bias. By applying a 2nd reset stage after the transformation of the 1st reset stage, it was found that the RRAM could return to the initial state. From I-V curves measured in these two reset stages, it was found that the current conduction was dominated by Schottky emission due to the migration of oxygen ions and recombination with oxygen vacancies. This reaction could break the conducting filament so as to transform carrier transport mechanism to Schottky emission. This also results in the simultaneous transformation from low resistance state (LRS) to high resistance state (HRS). © 2015 Elsevier Ltd. All rights reserved.

Keyword:

HfO2 multi-level-cell; Resistance random access memory (RRAM); ZnO

Community:

  • [ 1 ] [Hsieh, W.-K.]Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan
  • [ 2 ] [Lam, K.-T.]Institute of Creative Industries Research, Fuzhou University, Jimei, Xiamen, Fujian, 361024, China
  • [ 3 ] [Chang, S.-J.]Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan

Reprint 's Address:

  • [Chang, S.-J.]Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung UniversityTaiwan

Email:

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Source :

Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year: 2015

Volume: 35

Page: 30-33

2 . 2 6 4

JCR@2015

4 . 2 0 0

JCR@2023

ESI HC Threshold:335

JCR Journal Grade:1

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 29

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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