Preparation and characterization of SnO2/WO3/MWCNT nanocomposite thin film for NO2 gas sensor - Details

author：

Wei, L. (Wei, L..) ^[1] | Shizhen, H. (Shizhen, H..) ^[2] | Wenzhe, C. (Wenzhe, C..) ^[3]

Indexed by：

Scopus

Abstract：

A　novel　nanocomposite　thin　film　material　of　SnO2/WO3　metal　oxide　compound　doped　by　multi-walled　carbon　nanotubes　(MWCNT)　and　its　corresponding　gas　sensor　were　prepared　by　radio　frequency　(RF)　reactive　magnetron　sputtering.　The　surface　composition　and　chemical　elements　of　the　thin　film　material　were　respectively　analyzed　and　validated　by　X-ray　diffraction　(XRD)　and　photoelectron　spectroscopy　(XPS).　The　influencing　factors　of　gas　sensing　properties　were　studied　and　the　test　results　of　gas　sensor　were　analyzed.　The　results　indicated　that　the　detection　using　the　composite　material　gas　sensors　for　low　concentration　NO2　toxic　gas　could　be　greatly　improved　by　MWCNTs　which　were　doped　on　the　mixed　oxides　matrix.　A　possible　mechanism　explaining　the　behaviour　of　the　thin　film　gas　sensor　was　introduced.　©　(2010)　Trans　Tech　Publications.

Keyword：

NO2; RF reactive magnetron sputtering; SnO2/WO3/MWCNT; Thin film

Community：

[ 1 ] [Wei, L.]College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China
[ 2 ] [Wei, L.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350002, China
[ 3 ] [Wei, L.]Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
[ 4 ] [Shizhen, H.]College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China
[ 5 ] [Shizhen, H.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350002, China
[ 6 ] [Shizhen, H.]Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
[ 7 ] [Wenzhe, C.]College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China

Reprint 's Address：

[Wei, L.]College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China

Email：

mqks@fzu.edu.cn

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Source ：

Advanced Materials Research

ISSN： 1022-6680

Year： 2010

Volume： 129-131

Page： 99-103

Language： English

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count： 2

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 1

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