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Abstract:
The novel type of electrode, fabricated with the Ag-based Cr/Cu/Ag/Cu/Cr composite layers deposited by DC magnetron sputtering and by lithography, was developed. The microstructures and properties of the composite layers, before and after annealing, were characterized with X-ray diffraction, scanning electron microscopy, and conventional surface probes. The impacts of the growth conditions on the composite layers were evaluated. We found that while acting as the oxygen diffusion barrier, the Cu layer improves the adhesion at the interface of Cr and Ag. Besides, low temperature annealing, say 500°C, little affects the resistivity of the electrode possibly because the Cu and Cr layers protect Ag against oxidation. The results show that the novel Cr/Cu/Ag/Cu/Cr electrode with favorable properties, such as low resistivity, high oxidation resistance, good stability in high temperature annealing, especially in high temperature sealing, may be the promising material in fabricating field emission flat display panel.
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Source :
Journal of Vacuum Science and Technology
ISSN: 1672-7126
Year: 2011
Issue: 4
Volume: 31
Page: 381-385
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 3
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