This　study　demonstrates　that　anatase　TiO　2　thin　films　were　grown　on　Corning　glass　substrates　by　radio　frequency　magnetron　sputtering　and　were　then　used　to　fabricate　metal-semiconductor-metal　(MSM)　ultraviolet　(UV)　photodetectors　(PDs)　with　different　contact　electrodes　(Ag　or　Au).　With　a　320-nm　illumination　and　5　V　applied　bias,　the　responsivities　for　the　Ag/TiO　2　/Ag　and　Au/TiO　2　/Au　MSM　PDs　were　4.31　and　16.6　A/W,　respectively.　Additionally,　the　photoconductive　gain　and　Schottky　barrier　height　at　the　Ag/TiO　2　and　Au/TiO　2　interfaces　were　also　discussed　in　the　investigation.　Copyright　©　Taylor　&　Francis　Group,　LLC.