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Abstract：
The paper discusses the test of the new type MEMS ammonia sensitive sensor. The sensor has a MOS structure. The sensitivity and stability of the sensor was studied. The paper focuses on the influence of the thin film decorated on the gate. The experimental results showed that the sensor has a good sensitivity and selectivity, that＇s because its gate is decorated by mixed metal thin film. And only when the thin film is betweenl0nm and 30nm, the sensor was most sensitive to NH 3.
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Proceedings of SPIE - The International Society for Optical Engineering
ISSN： 0277-786X
Year： 2005
Volume： 5774
Page： 543-546
Language： English
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ESI Highly Cited Papers on the List： 0 Unfold All
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30 Days PV： 1
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