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author:

Liu, Zhiqiang (Liu, Zhiqiang.) [1] | Liu, Bingyao (Liu, Bingyao.) [2] | Ren, Fang (Ren, Fang.) [3] | Yin, Yue (Yin, Yue.) [4] | Zhang, Shuo (Zhang, Shuo.) [5] | Liang, Meng (Liang, Meng.) [6] | Dou, Zhipeng (Dou, Zhipeng.) [7] | Liu, Zhetong (Liu, Zhetong.) [8] | Yang, Shenyuan (Yang, Shenyuan.) [9] | Yan, Jianchang (Yan, Jianchang.) [10] | Wei, Tongbo (Wei, Tongbo.) [11] | Yi, Xiaoyan (Yi, Xiaoyan.) [12] | Wu, Chaoxing (Wu, Chaoxing.) [13] | Guo, Tailiang (Guo, Tailiang.) [14] | Wang, Junxi (Wang, Junxi.) [15] | Zhang, Yong (Zhang, Yong.) [16] | Li, Jinmin (Li, Jinmin.) [17] | Gao, Peng (Gao, Peng.) [18]

Indexed by:

EI

Abstract:

The performance of nitride devices is strongly affected by their polarity. Understanding the polarity determination and evolution mechanism of polar wurtzite nitrides on nonpolar substrates is therefore critically important. This work confirms that the polarity of AlN on sapphire prepared by metal–organic chemical vapor deposition is not inherited from the nitrides/sapphire interface as widely accepted, instead, experiences a spontaneous polarity inversion during the growth. It is found that at the initial growth stage, the interface favors the nitrogen-polarity, rather than the widely accepted metal-polarity or randomly coexisting. However, the polarity subsequently converts into the metal-polar situation, at first locally then expanding into the whole area, driven by the anisotropy of surface energies, which results in universally existing inherent inverse grain boundaries. Furthermore, vertical two-dimensional electron accumulation originating from the lattice symmetry breaking at the inverse grain boundary is first revealed. This work identifies another cause of high-density defects in nitride epilayers, besides lattice mismatch induced dislocations. These findings also offer new insights into atomic structure and determination mechanism of polarity in nitrides, providing clues for its manipulation toward the novel hetero-polarity devices. © 2022 Wiley-VCH GmbH.

Keyword:

Aluminum nitride Grain boundaries III-V semiconductors Lattice mismatch Metallorganic chemical vapor deposition Metals Nitrides Organic chemicals Sapphire Substrates Wide band gap semiconductors Zinc sulfide

Community:

  • [ 1 ] [Liu, Zhiqiang]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 2 ] [Liu, Zhiqiang]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 3 ] [Liu, Bingyao]Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing; 100871, China
  • [ 4 ] [Liu, Bingyao]Beijing Graphene Institute (BGI), Beijing; 100095, China
  • [ 5 ] [Liu, Bingyao]Academy for Advanced Interdisciplinary Studies, Peking University, Beijing; 100871, China
  • [ 6 ] [Ren, Fang]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 7 ] [Ren, Fang]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 8 ] [Yin, Yue]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 9 ] [Yin, Yue]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 10 ] [Zhang, Shuo]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 11 ] [Zhang, Shuo]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 12 ] [Liang, Meng]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 13 ] [Liang, Meng]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 14 ] [Dou, Zhipeng]Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing; 100871, China
  • [ 15 ] [Dou, Zhipeng]Beijing Graphene Institute (BGI), Beijing; 100095, China
  • [ 16 ] [Liu, Zhetong]Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing; 100871, China
  • [ 17 ] [Liu, Zhetong]Beijing Graphene Institute (BGI), Beijing; 100095, China
  • [ 18 ] [Liu, Zhetong]Academy for Advanced Interdisciplinary Studies, Peking University, Beijing; 100871, China
  • [ 19 ] [Yang, Shenyuan]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 20 ] [Yang, Shenyuan]State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 21 ] [Yan, Jianchang]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 22 ] [Yan, Jianchang]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 23 ] [Wei, Tongbo]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 24 ] [Wei, Tongbo]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 25 ] [Yi, Xiaoyan]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 26 ] [Yi, Xiaoyan]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 27 ] [Wu, Chaoxing]College of Physics and Information Engineering, Fuzhou University, Fujian, Fuzhou; 350108, China
  • [ 28 ] [Guo, Tailiang]College of Physics and Information Engineering, Fuzhou University, Fujian, Fuzhou; 350108, China
  • [ 29 ] [Wang, Junxi]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 30 ] [Wang, Junxi]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 31 ] [Zhang, Yong]Department of Electrical and Computer Engineering, The University of North Carolina at Charlotte, Charlotte; NC; 28223, United States
  • [ 32 ] [Li, Jinmin]Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China
  • [ 33 ] [Li, Jinmin]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China
  • [ 34 ] [Gao, Peng]Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing; 100871, China
  • [ 35 ] [Gao, Peng]Beijing Graphene Institute (BGI), Beijing; 100095, China
  • [ 36 ] [Gao, Peng]Academy for Advanced Interdisciplinary Studies, Peking University, Beijing; 100871, China
  • [ 37 ] [Gao, Peng]Collaborative Innovation Center of Quantum Matter, Beijing; 100871, China
  • [ 38 ] [Gao, Peng]Interdisciplinary Institute of Light-Element Quantum Materials and Research Center for Light-Element Advanced Materials, Peking University, Beijing; 100871, China

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Small

ISSN: 1613-6810

Year: 2022

Issue: 16

Volume: 18

1 3 . 3

JCR@2022

1 3 . 0 0 0

JCR@2023

ESI HC Threshold:91

JCR Journal Grade:1

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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