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An optical apparatus was proposed in this paper that allows simultaneously equal-optical-path imaging of both front and rear end surfaces of the thermoelectric cooler (TEC) components. This optical apparatus can be used to simultaneously inspect surface defects on both front and rear end surfaces in the traveling direction of the TEC components. Two sets of right-angle relay prisms and one image combiner are used to build an optical apparatus for simultaneously equal-optical-path imaging of both front and rear end surfaces of TEC components. The experiments of defects inspecting both front and rear end surfaces of the TEC components were carried out. The inspecting apparatus was used to collect 10, 000 images and the ResNet50 deep residual learning network was used to extract and learn its features. The accuracy of the trained model of 94.8% was obtained and the average inspection time for a single image was around 58ms. The experimental results show that the proposed optical inspecting apparatus can ensure the clear imaging of TEC components on both front and rear end surfaces on the CMOS sensor. It meets the requirements of TEC components end surface defects inspection and simplifies the system configuration, reduces the system cost, and improves the system reliability. © 2023 SPIE.
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ISSN: 0277-786X
Year: 2023
Volume: 12557
Language: English
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WoS CC Cited Count: 0
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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