A　majority　of　electroluminescence　spectroscopy　inspection　systems　for　LED　epitaxial　wafers　are　currently　focused　on　conductive　probe　contact　methods.　However,　the　huge　number　of　bead　chips　and　the　difficulty　in　performing　point　contact　due　to　the　microsize　largely　limit　its　application　in　the　field　of　Micro-LED　epitaxial　wafers.　In　order　to　improve　the　efficiency　of　electroluminescence　spectroscopy　inspection　of　Micro-LED　epitaxial　wafers,　this　study　proposed　a　practical　method　for　contactless　electroluminescence　of　Micro-LEDs,　which　can　achieve　contactless　electroluminescence　while　ensuring　the　characteristics　of　nondestructive　inspection.　The　basic　element　of　the　method　is　the　generation　of　an　induced　electric　potential　by　a　conducting　probe　under　a　high　frequency　alternating　electromagnetic　field.　The　high　frequency　skin　effect　of　the　conductor　causes　a　corona　discharge　arc　at　the　tip　of　the　probe.　The　electrical　and　optical　properties　of　the　contactless　electroluminescence　were　analyzed　by　experiments.　The　results　show　that　the　error　in　the　measured　value　of　the　spectral　distribution　is　less　than　2%.　The　system　has　an　ultra-high　dynamic　inspection　range,　demonstrating　the　capability　of　efficient　scanning　and　inspection.　©　2022　SPIE.