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author:

Chu, G. (Chu, G..) [1] | Yang, G. (Yang, G..) [2] | Liu, T. (Liu, T..) [3] | Li, J. (Li, J..) [4] | Chang, W. (Chang, W..) [5] (Scholars:常卫杰) | Fan, X. (Fan, X..) [6] | Tong, C. (Tong, C..) [7]

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Abstract:

In addition to the focusing and imaging functions,Metalens can also manipulate light field polarization,wavelength,and amplitude through kinds of meta-units. Due to the small size,light weight,low cost and easy inte⁃ gration,Metalens has become a research hotspot and important trend in optoelectronic integration area. In this pa⁃ per,finite-difference time-domain(FDTD)algorithm is used to design and optimize Metalens based on in⁃situ inte⁃ gration of InGaAs avalanche detectors,and the focusing efficiency and transmittance of the Metalens are calculated. The simulation results show that the Metalens converges incident light into the absorption layer of detector,the trans⁃ mittance reaches 82. 8%,and the focusing efficiency reaches 84. 89% when the target focal length is 150 μm and the Metalens radius is 50 μm. To further increase the transmittance,an anti-reflection(AR)layer is added. The results show that the maximum transmittance is 86. 6% and 87. 6% for 300 nm SiO2 and 250 nm SiN. Compared with the Metalens without AR layer,the max transmittance increased by 3. 8% and 4. 8%,respectively. Finally,it is estimat⁃ ed that the energy of the light field in the absorption region integrated with Metalens is 250. 96 times higher than that of the detector without Metalens,which can greatly improve the responsivity of detector. This paper proposes a mono⁃ lithic integrated method for avalanche detector with Metalens,which can concentrate the energy outside the detection area into absorption area,improves the quantum efficiency of detector without bandwidth reduction. This will provide a new sight for high responsivity and high bandwidth detectors. © 2023 Chines Academy of Sciences. All rights reserved.

Keyword:

detector focusing efficiency Metalens quantum efficiency

Community:

  • [ 1 ] [Chu G.]School of Physics Science and Information Engineering, Liaocheng University, Liaocheng, 252059, China
  • [ 2 ] [Chu G.]State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • [ 3 ] [Yang G.]State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • [ 4 ] [Liu T.]State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • [ 5 ] [Li J.]State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • [ 6 ] [Chang W.]School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou, 350108, China
  • [ 7 ] [Fan X.]School of Physics Science and Information Engineering, Liaocheng University, Liaocheng, 252059, China

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Source :

Chinese Journal of Luminescence

ISSN: 1000-7032

CN: 22-1116/O4

Year: 2023

Issue: 12

Volume: 44

Page: 2250-2257

Cited Count:

WoS CC Cited Count:

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ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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