Micro　energy　sources　as　the　nucleus　of　intelligent　microdevices　guarantee　their　full　autonomy　in　the　dimensions　of　time　and　space.　However,　the　state-of-the-art　micro　energy　storage　components,　like　all-solid-state　thin-film　microbatteries　(ASSTFBs),　whose　direct　integration　is　impeded　by　the　stereotyped　vacuum-based　manufacturing　technologies,　for　which　an　inevitable　high-temperature　annealing　step　(＞　500　°C)　can　exert　catastrophic　effects　on　the　attached　microdevices　during　the　crystallization　of　manufactured　insertion　thin-film　cathodes,　especially　in　flexible　integration.　Herein,　a　prototype　construction　is　created　to　benchmark　concrete　feasibility　for　the　low-temperature　manufacturing　of　ASSTFBs　via　a　nonvacuum-based　spin-coating　electrode　architecture.　Results　show　that　the　spin-coated　LiFePO4　films　enable　low-temperature　(≈　45　°C)　manufacturing　of　ASSTFBs,　by　which　it　can　deliver　excellent　cycling　performance　up　to　1000　cycles.　Importantly,　this　technology　presents　the　versatility　of　integrating　various　cathode　composites　into　ASSTFBs　and　is　therefore　generalized　to　the　LiCoO2-　and　Li4Ti5O12-based　solid-state　chemistries.　Furthermore,　ASSTFBs　with　such　compliant　electrodes　manifest　outstanding　flexibility　without　pronounced　capacity　degradation　by　successfully　integrating　on　flexible　temperature-sensitive　substrates.　The　spin-coating　protocol　provides　a　general　solution　for　excessive　processing　temperatures　and　ample　opportunities　for　the　development　of　on-chip　integratable　and　flexible　ASSTFBs.　©　2024　Wiley-VCH　GmbH.