Ultrafine　silicon　carbide　(SiC)　powders　have　garnered　increasing　attention　mainly　due　to　their　vast　potential　for　diverse　applications.　In　this　study,　a　plasma-enhanced　fluidized　bed　reactor　to　crack　hexamethyldisilane　(HMDS)　was　effectively　developed,　thereby　producing　SiC/NC　composites　with　diameters　ranging　from　10　to　20　nm.　This　method　enabled　large-scale　and　sustainable　production　of　SiC/NC　composites.　Concurrently,　nitrogen　doping　was　finally　achieved　by　introducing　ammonia　during　the　plasma　process,　which　increased　material　defects　and　thus　enhanced　electrical　conductivity.　Moreover,　the　abundant　hydrogen　atoms　in　ammonia　modulated　the　product　properties,　as　evidenced　by　reduced　particle　size,　enhanced　crystallinity　as　well　as　decreased　free-carbon　content.　The　synthesized　composites　were　applied　as　anodes　in　lithium-ion　batteries,　and　their　feasibility　was　confirmed　through　extensive　testing.　Notably,　SiC-150　exhibited　a　discharge　capacity　of　413mAh　g−1　after　200　cycles　at　0.1　A　g−1　and　maintained　a　high　specific　capacity　of　780mAh　g−1　even　after　800　cycles　at　0.5　A　g−1.　©　2025　Elsevier　B.V.