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author:

Chen, Hui (Chen, Hui.) [1] (Scholars:陈晖) | Fu, Xin (Fu, Xin.) [2] | Liu, Qi (Liu, Qi.) [3]

Indexed by:

EI Scopus SCIE

Abstract:

The analytical solution models have been constructed to describe the slip flow in the micro/nano gaps with moving boundary, including the case of immersion lithography. The two-dimensional computational fluid dynamics models are established to validate them. The results show that the slip flow varies with time and tends to a steady state quickly. The transient and steady states are investigated respectively to overall describe the slip flow, and there are significant differences between the slip and non-slip flow. Moreover, the stationary liquid on moving wall may be generated when the direction of pressure-driven flow is opposite to the direction of shear flow. This phenomenon is important to prevent liquid leakage during wafer scanning, and the corresponding parameters are optimized to improve the quality of advanced immersion lithography. (C) 2014 Elsevier B.V. All rights reserved.

Keyword:

Immersion lithography Micro/nano gaps Slip flow Velocity distribution

Community:

  • [ 1 ] [Chen, Hui]Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou 350108, Peoples R China
  • [ 2 ] [Chen, Hui]Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Zhejiang, Peoples R China
  • [ 3 ] [Fu, Xin]Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Zhejiang, Peoples R China
  • [ 4 ] [Liu, Qi]Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Zhejiang, Peoples R China

Reprint 's Address:

  • 陈晖

    [Chen, Hui]Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou 350108, Peoples R China

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Source :

MICROELECTRONIC ENGINEERING

ISSN: 0167-9317

Year: 2014

Volume: 123

Page: 167-170

1 . 1 9 7

JCR@2014

2 . 6 0 0

JCR@2023

ESI Discipline: ENGINEERING;

ESI HC Threshold:184

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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