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author:

Zhu, Jia (Zhu, Jia.) [1] | Huang, Yun (Huang, Yun.) [2] | Zhang, Kenan (Zhang, Kenan.) [3] | Lin, Guanzhou (Lin, Guanzhou.) [4] | Wu, Wengang (Wu, Wengang.) [5]

Indexed by:

CPCI-S EI Scopus

Abstract:

Metal-insulator-metal (MIM) multilayer structures as representative plasmonic systems have been widely studied. In such a system, the metal surface can sustain bound surface plasmon polaritons (SPPs) and couple the SPPs in a dielectric cavity. Herein, a novel fabrication process, based on electron beam lithography (EBL) followed by electroplating deposition of gold, has been developed to form longitudinal metal-air-metal structures. The structures consist of a suspended top film of gold supported by an array of gold pillars and a bottom ultrathin gold film. When the gap of the two gold films is comparable to or smaller than the decay length of the interface mode, the interaction between SPPs gives rise to coupled modes which can localize the light into the insulating layer for stronger field confine and light-matter interaction. This structure exhibits vibrant reflective color at normal incident light and significant color varying with different matter filling in the nano-cavity. The sensitivity can reach 269.8 nm/RIU which offers great potential for visual and real-time biochemical detection.

Keyword:

Nano-cavity Plasmonic Refraction index sensor

Community:

  • [ 1 ] [Zhu, Jia]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 2 ] [Huang, Yun]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 3 ] [Zhang, Kenan]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 4 ] [Wu, Wengang]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 5 ] [Zhang, Kenan]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Fujian, Peoples R China

Reprint 's Address:

  • [Wu, Wengang]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

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Source :

2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)

ISSN: 1084-6999

Year: 2020

Page: 1167-1170

Language: English

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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