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Abstract：
there are several methods for measuring the static characteristic of pressure sensors. In this paper we state and adopt the connecting terminals linear scale method to measure the linearity, sensitivity, and hysteresis of the double-island diffusing silicon piezoresistive pressure sensor (PT14).
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ICEMI '97 - CONFERENCE PROCEEDINGS: THIRD INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS
Year： 1997
Page： 349-352
Language： English
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ESI Highly Cited Papers on the List： 0 Unfold All
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30 Days PV： 0
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