An　acoustic-excitation　optical　coherence　vibrometer　(AE-OCV)　is　proposed　for　noncontact　microstructure　vibration　measurement　and　modal　analysis.　The　vibration　dynamic　parameters　of　the　microstructure　can　be　captured　with　a　subnanometer　displacement　resolution　by　the　proposed　AE-OCV　using　spectral　wavelength　calibration　algorithm　and　spectral　center　correction　method.　The　natural　frequency　of　the　microstructure　could　also　be　obtained　by　the　developed　noncontact　AE-OCV　system　using　the　swept-frequency　acoustic　excitation　method.　Furthermore,　a　home-made　spectrometer　based　on　a　high-speed　linear　camera　could　provide　the　system　with　a　frequency　measurement　range　of　0-50　kHz.　The　developed　AE-OCV　has　an　excellent　performance　in　microstructures　vibration　measurement　and　modal　analysis,　especially　for　high-frequency　and　nanoscale　vibration　measurements.　It　is　of　great　significance　to　the　design　of　the　microelectromechanical　system　(MEMS),　such　as　the　noncontact　dynamic　measurement　of　cantilevered　beams　in　atomic　force　microscopy.　©　1963-2012　IEEE.