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Abstract:
The tin oxide films were deposited by reactive magnetron sputtering on glass substrates. The influence of the growth conditions, including the substrate temperature, deposition rate, ratio of argon and oxygen flow rates, and film thickness, on the microstructures and emission characteristics were evaluated. The prototyped SnO2-array cathode was fabricated and characterized with scanning electron microscopy. The results show that the film thickness strongly affects the field emission property. For instance, the best emitter array can be fabricated with a 60 nm thick SnO2 film. At the on-set voltage of 4.5 V/μm, the emission current density was found to be 10 μA/m2; at a bias voltage of 7 V/μm, the highest emission intensity resulted in a luminosity of 2180 cd/m2.
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Journal of Vacuum Science and Technology
ISSN: 1672-7126
Year: 2012
Issue: 5
Volume: 32
Page: 368-371
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4
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