ZnS　thin　films　were　deposited　on　glass　substrates　by　electron-beam　evaporation　technique　at　different　substrate　temperatures.　The　effects　of　substrate　temperature　on　properties　of　films　were　investigated.　The　results　show　that　the　ZnS　films　are　of　n-type　conduction,　they　are　polycrystalline　ZnS　thin　films　with　sphalerite　structure,　and　the　crystallites　in　the　films　are　exclusively　oriented　along　the　(111)　direction.　With　the　increasing　of　the　substrate　temperature,　the　crystallinity　of　ZnS　films　becomes　better,　and　the　transmittance　and　the　carrier　concentration　of　the　films　increase,　while　their　resistivity　decreases.