Radio frequency magnetron sputtering SnO2 doped MWCNTs thin film - Details

author：

Lin, W. (Lin, W..) ^[1] (Scholars：林伟) | Huang, S. (Huang, S..) ^[2] (Scholars：黄世震) | Chen, W. (Chen, W..) ^[3]

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Scopus PKU CSCD

Abstract：

The　SnO2　doped　multi-walled　carbon　nanotubes　(MWCNTs)　thin　film　NO2　gas　sensor,　prepared　by　radio　frequency　(RF)　reactive　magnetron　sputtering,　showed　high　sensitivity　to　ultra-low　concentrations　of　NO　2　in　the　parts　per　billion　(ppb)　range,　even　low　to　10　×　10-9.　Scanning　electron　microscope　(SEM)　and　X-ray　diffraction　(XRD)　characterizations　indicated　that　the　MWCNTs　were　affected　by　the　morphology　of　the　SnO2　thin　film　and　the　particle　size.　The　properties　of　the　SnO2　thin　film　with　MWC-NTs　inclusion　were　investigated,　such　as　sensitivity,　selectivity,　response-recovery　time.　Experimental　results　revealed　that　the　SnO2　doped　MWCNTs　thin　film　response　to　NO2　gas　depended　on　the　operating　temperature,　the　NO2　gas　concentration,　thermal　treatment　conditions,　the　film　thickness　and　so　on.　Mechanism　of　gas-sensing　property　of　SnO2/MWCNTs　thin　film　were　investigated,　the　results　revealed　that　the　improved　gas-sensing　performance　should　be　attributed　to　the　dual　effects　between　MWCNTs　(p-type)　and　SnO2(n-type)　semiconductor.

Keyword：

Gas sensor; Multi-walled carbon nanotubes; NO2; RF reactive magnetron sputtering; SnO2

Community：

[ 1 ] [Lin, W.]College of Material Science and Engineering, FuZhou University, Fuzhou 350002, China
[ 2 ] [Lin, W.]College of Physics and Information Engineering, FuZhou University, Fuzhou 350002, China
[ 3 ] [Lin, W.]FuJian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
[ 4 ] [Huang, S.]College of Material Science and Engineering, FuZhou University, Fuzhou 350002, China
[ 5 ] [Huang, S.]College of Physics and Information Engineering, FuZhou University, Fuzhou 350002, China
[ 6 ] [Huang, S.]FuJian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
[ 7 ] [Chen, W.]College of Material Science and Engineering, FuZhou University, Fuzhou 350002, China

Reprint 's Address：

林伟
[Lin, W.]College of Material Science and Engineering, FuZhou University, Fuzhou 350002, China

Email：

mqks@fzu.edu.cn

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Source ：

Chinese Journal of Sensors and Actuators

ISSN： 1004-1699

CN： 32-1322/TN

Year： 2009

Issue： 6

Volume： 22

Page： 771-775

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 2

Affiliated Colleges：

物理与信息工程学院、微电子学院本学院/部未明确归属的数据

材料科学与工程学院本学院/部未明确归属的数据

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