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author:

叶光 (叶光.) [1] | 林志贤 (林志贤.) [2] (Scholars:林志贤) | 郭太良 (郭太良.) [3] (Scholars:郭太良)

Abstract:

介绍了在玻璃衬底上射频磁控溅射SiO2薄膜的工艺技术,给出了薄膜淀积速率,膜内组分与工艺条件特别是溅射气压的关系.实验证明,和其他镀膜技术相比,射频磁控溅射可以在更低的温度下制备致密、均匀、重复性好的Si02薄膜.

Keyword:

SiO2薄膜 淀积速率 磁控溅射

Community:

  • [ 1 ] [叶光]福州大学
  • [ 2 ] [林志贤]福州大学
  • [ 3 ] [郭太良]福州大学

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Source :

龙岩师专学报

ISSN: 1673-4629

CN: 35-1286/G4

Year: 2002

Issue: 6

Volume: 20

Page: 44-45,48

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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