Abstract:
介绍晶体生长控温系统的组成,微弱温差信号的接口调理方法及智能控制器的分级控制方式。系统控温范围(25~ 75)℃,控温精度达0.01℃,分辨率0.001℃,投入使用多年来,工作稳定可靠。
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Source :
仪表技术
Year: 2005
Issue: 01
Page: 44-46
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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