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Abstract:
Highly sensitive pressure sensors are often deployed in human-machine interaction area, touch screen and human motion detection. However, there are still great challenges to fabricating with high sensitivity pressure sensor with wide-range detection. Herein, we developed a new strategy to fabricate a highly sensitive pressure sensor using sandpaper and improve its detection range using a sacrificial template. It was the fthatirst time to combine microstructure processing with the sacrificial template method to fabricate pressure sensor. The microstructure of sandpaper endowed the sensor with high sensitivity, and the elastic substrate enhanced the sensor ability to resist high pressure without being damaged. The fabricated sensor device exhibits a superior sensitivity of 39.077 kPa−1 in the range from 50 kPa to 110 kPa with a broad linear response. Remarkably, high pressure ceiling ( © 2022
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Journal of Materials Science and Technology
ISSN: 1005-0302
Year: 2022
Volume: 130
Page: 184-192
1 0 . 9
JCR@2022
1 1 . 2 0 0
JCR@2023
ESI HC Threshold:91
JCR Journal Grade:1
CAS Journal Grade:1
Cited Count:
SCOPUS Cited Count: 28
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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