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author:

Tian, Liang (Tian, Liang.) [1] | Lin, Chang (Lin, Chang.) [2] | Pan, Kui (Pan, Kui.) [3] | Lu, Yu (Lu, Yu.) [4] | Deng, Liying (Deng, Liying.) [5] | Huang, Zhonghang (Huang, Zhonghang.) [6] | Yang, Tianxi (Yang, Tianxi.) [7] | Zhang, Yongai (Zhang, Yongai.) [8] | Sun, Jie (Sun, Jie.) [9] | Yan, Qun (Yan, Qun.) [10]

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EI

Abstract:

We propose that electroless plating is a superb approach to preparing metallic bumps with an ultrafine pitch for the integration of a micro light-emitting diode (micro-LED). Electroless plating does not suffer from lift-off-related issues, which are ubiquitous in thermal evaporation. Besides, it can result in much more uniform bumps than electroplating because the bump height is not affected by the current distribution. This study reports ultrafine pitch Ni/Au bumps fabricated by electroless nickel immersion gold (ENIG) plating. Furthermore, cheap metals iron and nickel are selected to catalyze the electroless nickel process. The results indicate that uniform and consistent Ni/Au bumps can be obtained through the iron sheet and nickel layer method. Besides, no voids and impurities are found inside the bumps, which is beneficial for the following interconnection process. Moreover, the change in Ni bump height values with the electroless plating time is also provided. © 2016 American Chemical Society.

Keyword:

Electroless plating Iron Nickel Thermal evaporation

Community:

  • [ 1 ] [Tian, Liang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 2 ] [Lin, Chang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 3 ] [Lin, Chang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 4 ] [Pan, Kui]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 5 ] [Lu, Yu]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 6 ] [Deng, Liying]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 7 ] [Huang, Zhonghang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 8 ] [Huang, Zhonghang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 9 ] [Yang, Tianxi]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 10 ] [Yang, Tianxi]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 11 ] [Zhang, Yongai]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 12 ] [Zhang, Yongai]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 13 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 14 ] [Sun, Jie]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 15 ] [Sun, Jie]Quantum Device Physics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg; 41296, Sweden
  • [ 16 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
  • [ 17 ] [Yan, Qun]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 18 ] [Yan, Qun]Rich Sense Electronics Technology Co., Ltd., Jinjiang, Quanzhou; 362200, China

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Source :

ACS Applied Electronic Materials

Year: 2022

Issue: 10

Volume: 4

Page: 4966-4971

4 . 7

JCR@2022

4 . 4 0 0

JCR@2023

ESI HC Threshold:91

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 4

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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