High Performance Ge FinFET CMOS Invertor with ION=2.0 mA/ m at VOV=1V,S.S.=64 mV/dec,ION/IOFF=2.5 106, and Voltage Gain=90 V/V by Using High Pressure Supercritical Fluid Hydroxide Oxidation - Details

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Abstract：

A　high　performance　Ge　FinFET　CMOS　invertor　with　ION=2mA/　m　at　VOV　=1V,S.S.=64mV/dec,ION/IOFF=2.5　106　,　and　voltage　gain=90　V/V　is　achieved　by　a　high　pressure　supercritical　fluid　hydroxide　oxidation,　due　to　the　reduced　unstable　oxidation　states　and　oxygen　vacancy.　©　2023　JSAP.

Keyword：

CMOS integrated circuits Effluent treatment FinFET Gain measurement Germanium Ions Oxidation Supercritical fluids

Community：

[ 1 ] [Wu, Cheng-Yu]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 2 ] [Ruan, Dun-Bao]College of Physics and Information Engineering, Fuzhou University, China
[ 3 ] [Chang-Liao, Kuei-Shu]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 4 ] [Lee, Yao-Jen]Taiwan Semiconductor Research Institute, Taiwan
[ 5 ] [Chiu, Yu-Chuan]Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University, Department of Photonics, Taiwan
[ 6 ] [Liu, Chih-Wei]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 7 ] [Liu, Guan-Ting]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 8 ] [Kuo, Bo-Lien]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 9 ] [Yang, Kai-Chun]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 10 ] [Li, Cheng-Han]National Tsing Hua University, Department of Engineering and System Science, Taiwan
[ 11 ] [Liu, Po-Tsun]Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University, Department of Photonics, Taiwan

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High Performance Ge FinFET CMOS Invertor with ION=2.0 mA/ m at VOV=1V,S.S.=64 mV/dec,ION/IOFF=2.5 106, and Voltage Gain=90 V/V by Using High Pressure Supercritical Fluid Hydroxide Oxidation
2023，2023 Silicon Nanoelectronics Workshop, SNW 2023

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Year： 2023

Page： 23-24

Language： English

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ESI Highly Cited Papers on the List： 0 Unfold All

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30 Days PV： 4

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