AFM fabrication and characterization of nanoscale Al2O3 patterns - Details

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SCIE

Abstract：

In　this　paper　the　atomic　force　microscopy　(AFM)　fabrication　of　nanoscale　Al2O3　patterns　were　studied.　Nanowire,　rings,　dot　array　and　pattern　were　fabricated　on　Si　substrates　with　SiO2　surface　layer.　The　effects　of　applied　voltage　and　scanning　speed　on　obtained　Al2O3　pattern　were　evaluated　and　the　anodic　oxidation　mechanism　was　discussed.

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[ 1 ] [Jiao, Zheng]Shanghai Univ, Sch Environm & Chem Engn, Shanghai 201800, Peoples R China
[ 2 ] [Wu, Minghong]Shanghai Univ, Sch Environm & Chem Engn, Shanghai 201800, Peoples R China
[ 3 ] [Zhang, Haijiao]Shanghai Univ, Inst Nanochem & Nanobiol, Shanghai 201800, Peoples R China
[ 4 ] [Guo, Huijiao]Shanghai Univ, Inst Nanochem & Nanobiol, Shanghai 201800, Peoples R China
[ 5 ] [Wang, Jia]Shanghai Univ, Inst Nanochem & Nanobiol, Shanghai 201800, Peoples R China
[ 6 ] [Zhao, Bing]Shanghai Univ, Inst Nanochem & Nanobiol, Shanghai 201800, Peoples R China
[ 7 ] [Ding, Guoji]Shanghai Univ, Inst Nanochem & Nanobiol, Shanghai 201800, Peoples R China

Reprint 's Address：

Email：

zjiao@shu.edu.cn |
mhwu@staff.shu.edu.cn |
gjding@shu.edu.cn

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JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

ISSN： 0957-4522

Year： 2009

Issue： 2

Volume： 20

Page： 177-180

1 . 0 2

JCR@2009

2 . 8 0 0

JCR@2023

JCR Journal Grade：2

CAS Journal Grade：1

Cited Count：

WoS CC Cited Count： 2

SCOPUS Cited Count： 2

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 3

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