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author:

Wei Huang (Wei Huang.) [1] | Jinling Yu (Jinling Yu.) [2] | Yu Liu (Yu Liu.) [3] | Yan Peng (Yan Peng.) [4] | Lijun Wang (Lijun Wang.) [5] | Ping Liang (Ping Liang.) [6] | Tangsheng Chen (Tangsheng Chen.) [7] | Xiangang Xu (Xiangang Xu.) [8] | Fengqi Liu (Fengqi Liu.) [9] | Yonghai Chen (Yonghai Chen.) [10]

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CSCD

Abstract:

Optical reflection anisotropy microscopy mappings of micropipe defects on the surface of a 4H-SiC single crystal are studied by the scanning anisotropy microscopy (SAM) system. The reflection anisotropy (RA) image with a ‘butterfly pattern’ is obtained around the micropipes by SAM. The RA image of the edge dislocations is theoretically simulated based on dislocation theory and the photoelastic principle. By comparing with the Raman spectrum, it is verified that the micropipes consist of edge dislocations. The different patterns of the RA images are due to the different orientations of the Burgers vectors. Besides, the strain distribution of the micropipes is also deduced. One can identify the dislocation type, the direction of the Burgers vector and the optical anisotropy from the RA image by using SAM. Therefore, SAM is an ideal tool to measure the optical anisotropy induced by the strain field around a defect.

Keyword:

edge dislocation reflection anisotropy scanning anisotropy microscopy SiC

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Source :

Chinese Physics B

ISSN: 1674-1056

Year: 2024

Issue: 3

Volume: 33

1 . 5 0 0

JCR@2023

CAS Journal Grade:3

Cited Count:

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ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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