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Abstract:
Achieving metal interconnects for printed circuit boards (PCBs) is pivotal for the electronics industry. Through electrochemical analysis of Basic Blue 7 (BB7), an excellent suppressing effect was observed. Chronopotentiometry was used to study the possible concentration range of BB7 for microvia filling and a BB7 concentration range of 50-150 mg L-1 was selected to achieve superfilling electrodeposition. A difunctional mechanism of coordination and adsorption of BB7 during electrodeposition is proposed based on density functional theory (DFT) calculations and in situ Raman spectroscopy analysis. The interaction among BB7, the copper substrate and Cu2+ leads to the suppression of copper growth. The superfilling electroplating process is optimized and high filling performance can be achieved at 100 mg L-1 with filling percentage (FP) values of 80.19%, 84.70% and 87.90% for microvias with diameters of 150 mu m, 125 mu m and 100 mu m, respectively. Besides, a differential diffusion filling mechanism is proposed for the blind microvia filling process of the newly proposed electroplating system based on the analyses of the interaction among additives and diffusion kinetics. Furthermore, the performance of the copper interconnect layer, including surface morphology, phase structure and signal transmittance, is evaluated.
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NEW JOURNAL OF CHEMISTRY
ISSN: 1144-0546
Year: 2025
Issue: 28
Volume: 49
Page: 12079-12089
2 . 7 0 0
JCR@2023
Cited Count:
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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