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author:

Chen, Yong Zhen (Chen, Yong Zhen.) [1] | Wang, Zhi Yuan (Wang, Zhi Yuan.) [2] | Luo, Zhen Xin (Luo, Zhen Xin.) [3] | Wang, Shao Hao (Wang, Shao Hao.) [4]

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Abstract:

Channel-all-around (CAA) amorphous oxide semiconductor field-effect transistors (AOSFETs) represent a promising technology for next-generation, low-power, three-dimensional integrated dynamic random-access memory (DRAM) with high density and low-temperature process compatibility. In two-transistor capacitorless (2T0C) CAA AOSFETs gain cells, the storage node (SN) parasitic capacitances are governed by both intrinsic cell parasitic and interconnect parasitic capacitances. This work employs the partial-element equivalent circuit (PEEC) method to efficiently extract parasitic capacitances from large-scale arrays. We systematically investigate the impact of these capacitances on the SN charge-retention capability. Furthermore, we propose two optimization methods that enhance the voltage consistency across a 128-cell column to 76.43%. © 2025 IEEE.

Keyword:

Capacitance Cells Cytology Dynamic random access storage Equivalent circuits Heterojunction bipolar transistors MOS devices MOSFET devices Oxide semiconductors Temperature Three dimensional integrated circuits

Community:

  • [ 1 ] [Chen, Yong Zhen]FZU-Jinjiang Joint Institute of Microelectronics, College of Physics and Information Engineering, Fuzhou University, Fujian, Fuzhou, China
  • [ 2 ] [Wang, Zhi Yuan]FZU-Jinjiang Joint Institute of Microelectronics, School of Advanced Manufacturing, Fuzhou University, Fujian, Jinjiang, China
  • [ 3 ] [Luo, Zhen Xin]FZU-Jinjiang Joint Institute of Microelectronics, School of Advanced Manufacturing, Fuzhou University, Fujian, Jinjiang, China
  • [ 4 ] [Wang, Shao Hao]FZU-Jinjiang Joint Institute of Microelectronics, College of Physics and Information Engineering, Fuzhou University, Fujian, Fuzhou, China

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Year: 2025

Page: 148-151

Language: English

Cited Count:

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ESI Highly Cited Papers on the List: 0 Unfold All

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30 Days PV: 0

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