Herein,　SmFeO3　thin　films　are　prepared　by　using　magnetron　sputtering　technology　on　quartz-glass　and　SrTiO3(STO)(100)　substrates.　The　influence　of　film　thickness　and　choice　of　substrate　on　film　quality　and　growth　orientation　is　studied　in　detail.　Moreover,　the　impact　of　phase　purity　and　growth　orientation　on　optical,　magnetic　and　magneto-optical　properties　is　discussed.　The　results　reveal　that　the　film　thickness　and　choice　of　substrate　significantly　influence　the　induced　stresses　at　film/substrate　interface　and　growth　orientation　of　the　annealed　film　The　as-fabricated　SmFeO3　thin　films　have　demonstrated　highly　crystalline　structure,　excellent　transmittance　and　enhanced　magneto-optical　properties.　Moreover,　obvious　anisotropy　in　magnetization　and　magneto-optical　properties　has　been　observed.　The　SmFeO3　films　with　excellent　magneto-optical　properties　can　be　fabricated　by　selecting　optimal　film　thickness　and　substrate.　It　is　expected　that　SmFeO3　film　is　a　promising　material　for　integrated　optical　isolators　and　magneto-optical　modulators.