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author:

Abliz, Ablat (Abliz, Ablat.) [1] | Gao, Qingguo (Gao, Qingguo.) [2] | Wan, Da (Wan, Da.) [3] | Liu, Xingqiang (Liu, Xingqiang.) [4] | Xu, Lei (Xu, Lei.) [5] | Liu, Chuansheng (Liu, Chuansheng.) [6] | Jiang, Changzhong (Jiang, Changzhong.) [7] | Li, Xuefei (Li, Xuefei.) [8] | Chen, Huipeng (Chen, Huipeng.) [9] (Scholars:陈惠鹏) | Guo, Tailiang (Guo, Tailiang.) [10] (Scholars:郭太良) | Li, Jinchai (Li, Jinchai.) [11] | Liao, Lei (Liao, Lei.) [12]

Indexed by:

EI Scopus SCIE

Abstract:

Despite intensive research on improvement in electrical performances of ZnO-based thin-film transistors (TFTs), the instability issues have limited their applications for complementary electronics. Herein, we have investigated the effect of nitrogen and hydrogen (N/H) codoping on the electrical performance and reliability of amorphous InGaZnO (alpha-IGZO) TFTs. The performance and bias stress stability of alpha-IGZO device were simultaneously improved by N/H plasma treatment with a high field-effect mobility Of 45.3 cm(2)/(V s) and small shifts-of threshold voltage(V-th). On the basis of Xray photoelectron spectroscopy analysis, the improved electrical performances of a-IGZO TFT should be attributed to the appropriate amount of N/H codoping, which could not only control the. V-th and carrier concentration efficiently) but also passivate the defects such as oxygen vacancy due to the formation of stable Zn-N and N-H bonds. Meanwhile, low-frequency noise analysis indicates that the average trap density near the alpha-IGZO/SiO2 interface is reduced by the nitrogen and hydrogen plasma treatment. This method could provide a step toward the development of alpha-IGZO TFTs for potential applications in next generation high-definition optoelectronic displays.

Keyword:

InGaZnO low-frequncy noise plasma treatment reliability thin-film transistors

Community:

  • [ 1 ] [Abliz, Ablat]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 2 ] [Wan, Da]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 3 ] [Xu, Lei]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 4 ] [Liu, Chuansheng]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 5 ] [Jiang, Changzhong]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 6 ] [Li, Jinchai]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 7 ] [Liao, Lei]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China
  • [ 8 ] [Abliz, Ablat]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 9 ] [Wan, Da]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 10 ] [Xu, Lei]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 11 ] [Liu, Chuansheng]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 12 ] [Jiang, Changzhong]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 13 ] [Li, Jinchai]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 14 ] [Liao, Lei]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China
  • [ 15 ] [Gao, Qingguo]Huazhong Univ Sci & Technol, Wuhan Natl High Magnet Field Ctr, Wuhan 430074, Peoples R China
  • [ 16 ] [Li, Xuefei]Huazhong Univ Sci & Technol, Wuhan Natl High Magnet Field Ctr, Wuhan 430074, Peoples R China
  • [ 17 ] [Gao, Qingguo]Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China
  • [ 18 ] [Li, Xuefei]Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China
  • [ 19 ] [Liu, Xingqiang]Hunan Univ, Sch Phys & Elect, Key Lab Micro Nanooptoelect Devices, Minist Educ, Changsha 410082, Hunan, Peoples R China
  • [ 20 ] [Liao, Lei]Hunan Univ, Sch Phys & Elect, Key Lab Micro Nanooptoelect Devices, Minist Educ, Changsha 410082, Hunan, Peoples R China
  • [ 21 ] [Chen, Huipeng]Fuzhou Univ, Inst Optoelect Display, Fuzhou 350002, Peoples R China
  • [ 22 ] [Guo, Tailiang]Fuzhou Univ, Inst Optoelect Display, Fuzhou 350002, Peoples R China

Reprint 's Address:

  • [Liu, Chuansheng]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China;;[Liao, Lei]Wuhan Univ, Sch Phys & Technol, Dept Microelect, Wuhan 430072, Peoples R China;;[Liu, Chuansheng]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China;;[Liao, Lei]Wuhan Univ, Sch Phys & Technol, Key Lab Artificial Micro & Nanostruct, Minist Educ, Wuhan 430072, Peoples R China;;[Liao, Lei]Hunan Univ, Sch Phys & Elect, Key Lab Micro Nanooptoelect Devices, Minist Educ, Changsha 410082, Hunan, Peoples R China

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Source :

ACS APPLIED MATERIALS & INTERFACES

ISSN: 1944-8244

Year: 2017

Issue: 12

Volume: 9

Page: 10798-10804

8 . 0 9 7

JCR@2017

8 . 5 0 0

JCR@2023

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:306

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 68

SCOPUS Cited Count: 71

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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