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Abstract:
Despite intensive research on improvement in electrical performances of ZnO-based thin-film transistors (TFTs), the instability issues have limited their applications for complementary electronics. Herein, we have investigated the effect of nitrogen and hydrogen (N/H) codoping on the electrical performance and reliability of amorphous InGaZnO (alpha-IGZO) TFTs. The performance and bias stress stability of alpha-IGZO device were simultaneously improved by N/H plasma treatment with a high field-effect mobility Of 45.3 cm(2)/(V s) and small shifts-of threshold voltage(V-th). On the basis of Xray photoelectron spectroscopy analysis, the improved electrical performances of a-IGZO TFT should be attributed to the appropriate amount of N/H codoping, which could not only control the. V-th and carrier concentration efficiently) but also passivate the defects such as oxygen vacancy due to the formation of stable Zn-N and N-H bonds. Meanwhile, low-frequency noise analysis indicates that the average trap density near the alpha-IGZO/SiO2 interface is reduced by the nitrogen and hydrogen plasma treatment. This method could provide a step toward the development of alpha-IGZO TFTs for potential applications in next generation high-definition optoelectronic displays.
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ACS APPLIED MATERIALS & INTERFACES
ISSN: 1944-8244
Year: 2017
Issue: 12
Volume: 9
Page: 10798-10804
8 . 0 9 7
JCR@2017
8 . 5 0 0
JCR@2023
ESI Discipline: MATERIALS SCIENCE;
ESI HC Threshold:306
JCR Journal Grade:1
CAS Journal Grade:2
Cited Count:
WoS CC Cited Count: 68
SCOPUS Cited Count: 71
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4
Affiliated Colleges: