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Abstract:
In this paper, we demonstrate the fabrication of ZnO-based thin-film transistors (TFTs) on flexible substrates (polyethylene terephthalate) through radio-frequency sputtering and low-temperature procedure. The device structure belongs to bottom-gate type TFTs where ZnO and HfO2 are used as channel and gate dielectric layer, respectively. XRD results show that the ZnO channel layers are hexagonal wurtzite structure with (002) orientation. The properties of the fabricated devices are also characterized within several environmental and physics conditions. It can be found that the flexible TFT device is with a low operating voltage and high current ON/OFF ratio; the gate leakage current and transparency are found to be similar to 12 nA and 75%, respectively. The gate leakage current (I-G), drain-source current (I-DS), ON/OFF current ratio (I-ON/OFF), threshold voltage (V-th), and field-effect mobility (mu(FE)) are measured under different bending modes.
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IEEE SENSORS JOURNAL
ISSN: 1530-437X
Year: 2013
Issue: 12
Volume: 13
Page: 4940-4943
1 . 8 5 2
JCR@2013
4 . 3 0 0
JCR@2023
ESI Discipline: ENGINEERING;
JCR Journal Grade:1
CAS Journal Grade:3
Cited Count:
WoS CC Cited Count: 15
SCOPUS Cited Count: 17
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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