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Abstract:
主要介绍微机电系统(MEMS)中几种测量薄膜力学性能的方法,如纳米压入法、单轴拉伸法、基底弯曲法、微旋转结构法,比较了各种方法的优缺点.这对MEMS器件的设计与研究具有重要意义.
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中国仪器仪表
ISSN: 1005-2852
CN: 11-3359/TH
Year: 2007
Issue: 5
Page: 49-51
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 6
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