• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
成果搜索

author:

陈光红 (陈光红.) [1] | 吴清鑫 (吴清鑫.) [2] | 于映 (于映.) [3] | 罗仲梓 (罗仲梓.) [4]

Indexed by:

CQVIP

Abstract:

主要介绍微机电系统(MEMS)中几种测量薄膜力学性能的方法,如纳米压入法、单轴拉伸法、基底弯曲法、微旋转结构法,比较了各种方法的优缺点.这对MEMS器件的设计与研究具有重要意义.

Keyword:

MEMS 力学性能 微旋转结构法 薄膜

Community:

  • [ 1 ] [陈光红]苏州职业大学
  • [ 2 ] [吴清鑫]苏州职业大学
  • [ 3 ] [于映]福州大学
  • [ 4 ] [罗仲梓]厦门大学

Reprint 's Address:

Email:

Show more details

Related Keywords:

Source :

中国仪器仪表

ISSN: 1005-2852

CN: 11-3359/TH

Year: 2007

Issue: 5

Page: 49-51

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

Online/Total:190/10018548
Address:FZU Library(No.2 Xuyuan Road, Fuzhou, Fujian, PRC Post Code:350116) Contact Us:0591-22865326
Copyright:FZU Library Technical Support:Beijing Aegean Software Co., Ltd. 闽ICP备05005463号-1